Mirra
The amount of heads needed to be up for production to be able to run the polisher.
What is 3 heads.
The direction the brushes rotate the Mesa cleaner.
What is both CW and CCW?
The first module in the AS2000
What is the Wet Loader.
The Two Chemical used in the brush modules.
What is HF and NH4OH
The handheld controllers nick name.
What is a Gameboy
Composed of carbon and fluorine atoms, this coats the 3 platens on the polisher.
What is Teflon?
The first module on the Mesa cleaner.
What is the input station.
The type of sensor that detects the Normal DIW level and detects the Empty level in the loader.
What is a capacitance sensor
The type of motor that spins the brushes.
What is a DC motor
The material control system used our Daifuku stockers and rail.
What is Roma MD
For the Oxide process platen 1 pad limit.
What is 27 hrs.
Is measured to see if the the cleaner chemical is within spec.
What is conductivity?
The type of motor that drives the wet loader up and down.
What is an AC servo motor?
The mechanism that hold the spin finger assembly at the correct height/level when a wafer is drying.
What is the Z-Lock?
E104 Error Code
What is Empty Retrieval
The type of head used in the STI process.
What is the Contour?
The number of belts used on one brush module in the Mesa Cleaner.
What is 6
The acronym DBC.
What is double brush chamber?
The number of EMO buttons on a Synergy Ontrak.
What is 3?
The acronym MCP
What is the Master Control Panel?
The acronym UPA stands for.
What is the Upper Pneumatic Assembly?
The name of the second station in the Mesa Cleaner.
What is the Megasonic?
The acronym DTC refers to this part of the AS2000 where the wafer is dried.
What is the Dry Task Chamber?
The number of height positions on the spindle assembly.
What is 3? top, mid, and bottom positions.
E103 Error Code
What is Double Storage