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Technique used to determine the 3D chemical composition of a material by eroding it layer by layer with a primary ion beam and analyzing the ejected secondary ions. Compliments dynamic SIMS
Depth Profile
Measure of a peaks intensity relative to the background noise. Measures sensitivity
Signal to Noise ratio
Incident ion pushes impurity atoms deeper into the material than they were originally located
Knock-On effects
The energy level which is occupied by the electron orbital at a temperature equal to 0 K
Fermi Level
The ejection of particles from the target by its bombardment with energetic particles
Sputtering
An instruments ability to separate ions with similar mass to charge ratios
Resolution
Occurs between two physical objects in which the total kinetic energy of the two bodies is conserved. Ideal situation: There is no net conversion of kinetic energy into other forms such as heat, sound or potential energy.
Elastic Collision
Soft ionization technique that uses multiple photons from a laser to excite a molecule to a specific intermediate electronic state, after which another photon ionizes it
REMPI
The duration it takes for a particle, object or wave to travel a specific distance through a medium
Time of Flight
The number of energetic primary ions striking a sample surface per unit area per unit time - controlled by adjusting components like ion source current, beam optics (lenses, apertures) and scanning systems
Primary Beam Flux
Positively or negatively charged ions (or atoms/molecules) sputtered from a sample surface when its bombarded by a high energy primary ion beam
Secondary Particles
Flow or stream of particles that are approaching and striking a surface barrier or target
Incident Particle Current
The dissociation of energetically unstable molecular ions formed from passing the molecules mass spectrum
Fragmentation
Thermodynamic process that occurs without transferring heat between the thermodynamic system and its environment
Adiabatic
System of four elements arranged in a specific geometric configuration
Quadrupole
The total number of particles or the total radiant energy that crosses a unit cross sectional area over a specific time interval. Cumulative quantity representing the total exposure to particles or energy OR energy of the laser pulse over the effective focal spot area (energy per unit area)
Fluence
The spreading of ion beams based on their m/z ratio when they pass through an analyzer
Angular Dispersion
Process where a photon transfers enough energy to an atom or molecule
Photoionization
Physical cutting, splitting or breaking as opposed to chemical
Physical Scisson
The interaction where an accelerated ion collides with a neutral gas molecule, causing the ion to gain internal energy and break apart into smaller fragment ions
Collision Induced Dissociation