Can I Get a Reaction?
It is the speed at which a chemical reaction proceeds.
What is Reaction Rate?
CVD processes occur in this phase of matter.
What is the gas phase?
The manufacturing of silicon wafers starts with this raw ingredient.
What is SiO2?
This waste stream is commonly recovered due to its high value.
What is Copper?
Resistance & Capacitance (RC) affect this property of a semiconductor device.
What is the speed (propagation delay)?
These three factors are the main ones that affect the reaction rate.
What are temperature, concentration and presence of catalysts?
It's the maximum amount of work that can be extracted from a system, a reaction parameter that is minimized during reactions, and a factor explaining the characteristics of a reaction products.
What is Gibbs Free Energy?
This type of silicon manufacturing process is an intermediate step in the manufacturing of single crystal Si,
What is Metallurgical Grade Silicon?
Typical wafer fabs have this many separate waste streams.
What is 6?
The process/tool is an exceptional method for controlling thin film uniformity.
What is Atomic Layer Deposition (ALD)?
Photoresist reacts with this diatomic molecule to form a gaseous byproduct.
What is oxygen?
Cone angle, charge, and metal ion characterize this molecule.
What are Metal Organic Ligands?
This chemical removes liberates NH3 as a gas and dissolves organics sets up a hydrophilic wafer surface.
What is Hexamethly-disilazane (HMDS)?
Particle filtration, carbon organic filter, Reverse-Osmosis, UV treatment are used to create this liquid that is critical to fab operation.
What is Ultra-High Purity water?
The backend process uses these two materials to improve the device performance.
What are Copper and Low-k dielectrics?
These highly reactive ionic contaminants are mainly introduced by fab personnel.
What are Potassium, Lithium and Sodium?
This is the 2nd order mechanism in Chemical Mechanical Planarization.
What is Chemical?
Corrosion Inhibitors, abrasives, oxidizers and surfactants are all found in this consumable item.
What are CMP chemical slurries?
These two waste streams should never be mixed.
What are solvent and acid?
Oxygen concentration, Temperature and light, and pH affect this type of cell at a copper junction.
What is the galvanic corrosion cell?
This in the general name for an atom or ion with unpaired valence electrons, which is highly reactive.
What is a Radical?
This silicon deposition process is able to resume orientation of substrate
What is Epitaxial silicon deposition?
The oxide strip rate for wet strip depends on this property of the film.
What is the oxide type?
This term means taking advantage of the benefits of recovering waste streams.
What is Synergistic Exploitation?
This property of ALD processes responsible for the its excellent uniformity and step coverage.
What is a self limiting reaction.