Films
Chemical Vapor Deposition processes occur in this Phase.
What is the Gas Phase?
Etch rate and profile, selectivity, uniformity, and etch bias are properties important to this process?
What is dry etch?
This determines the accuracy by which subsequent (following) layer accuracy can be performed.
What is mask overlay?
CMOS devices have to incorporate these type of doped wells.
What are n-well and p-well?
The oxidation of silicon involves these two separate growth rates behaviors.
What are linear and parabolic?
These are favorable characteristics of optimized thin films in submicron processing.
What is High Aspect Ratio Conformality and Good Step Coverage?
Anisotropic etching processes etch material in this direction.
What is one direction?
This is the first step in photolithography is critical to adhesion.
What is vapor prime?
This component selects out the correct ion to be implanted and redirects unwanted species.
What is analyzer magnet?
Improved gas flow dynamics, improved defect control, uniform temperature distribution are characteristics of this type furnace.
What is Vertical Furnace?
This very dense conductive film is used to form the vertical via structures in ILD layers.
What is Tungsten?
This formula is the definition of Etch Rate.
What is change in thickness over time.
The correct sequence of a general Photolithography Process starts with this critical step.
What is vapor prime?
Polish time, platen speed, slurry chemistry determine what?
What is the degree of planarization?
Silicon Dioxide's structure is best described as this type of film.
What is amorphous?
These are the 4 basic types of planarization.
What are smoothing, partial, local, global?
Polymer Sidewall Passivation in dry etch is process used to do improve this.
What is the anisotropic etch properties?
These two photolithography light sources used in submicron processing in UV spectral region.
What are excimer laser & mercury lamp?
The energy band gap for silicon is this value.
What is 1.12 eV?
Charge generated from the oxidation process parameters is this type.
What is Fixed Oxide charge?
Masking, device isolation, capacitors, implant screens, dopant barriers are characteristics of this type of film.
What are oxides?
The 3 main elements to almost all chemical reactions.
What are transport, reaction, removal by-products?
Centipoise is the unit used to measure of this property.
What is viscosity?
Silicon used to make silicon wafers is this type of material.
What is mono-crystalline or single crystal?
When silicon dioxide grows from a silicon surface the growth rate becomes parabolic due to this mechanism.
What is O2 limited diffusion thru oxide?